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Uniform film in large areas deposited by magnetron sputtering with a small target
  • ISSN号：0257-8972
  • 期刊名称：Surface and Coatings Technology
  • 时间：2013.8.8
  • 页码：222-225
  • 相关项目：四面体非晶碳为固贴式薄膜体声波谐振器布喇格反射栅高声阻抗材料的研究
作者： Zhu, J. Q.|Han, J. C.|Lei, P.|Yin, X. B.|
同期刊论文项目
四面体非晶碳为固贴式薄膜体声波谐振器布喇格反射栅高声阻抗材料的研究
期刊论文 24 会议论文 7 获奖 14 专利 2
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