中文摘要：

分析了尺蠖型压电直线驱动器的结构原理，建立了驱动器系统动力学模型。对驱动器定子进行了模态分析，并对分析结果进行了评价。对设计开发的驱动器样机输出特性进行了试验测试，实验测得驱动器单步输出位移稳定可靠，100V驱动电压下，单步输出位移为9．8μm。对驱动器直线动子的速度、加速度特性进行了测试，依据速度、加速度信号进一步分析了驱动器的动态响应特性。实验结果表明，所开发的驱动器具有动态特性好、运动稳定等优点。

英文摘要：

The structure and working principle of a inchworm-type piezoelectric linear actuator are analyzed, and the mechanical system dynamic modal of the actuator is established. Based on the analysis of the actuator＇s stator, the output performance of proposed actuator is analyzed,experimental results show that the output displacement of the actuator is stable, and the displacement for single step is 9.8 μm when the actuating voltage is 100 V. The velocity and acceleration properties of the linear actuator are tested. According to the testing results, the dynamic response performance of the actuator is analyzed deeply. The experimental results show that the proposed piezoelectric linear actuator has good dynamic performance and motion stability.