中文摘要：

研制了一种以自由端带有集中质量的悬臂式压电双品片为驱动单元的新型惯性冲击式直线精密驱动器。对自由端带有集中质量的悬臂式压电双晶片的动态特性进行了有限元法（FEM）分析和实验研究，提出了压电双晶片型惯性冲击式精密驱动器特定的定频调压驱动方法。对压电双晶片型惯性冲击式直线精密驱动器进行了性能测试，测试表明该驱动器具有结构简单，行程大，驱动力强和分辨率高等特点，特别是其成本不足传统惯性冲击式驱动器的百分之一。

英文摘要：

A new impact drive positioning device with end-loaded piezoelectric cantilever bimorphs is proposed. According to the results of FEA and experiments to the dynamic characteristics of end loaded piezoelectric cantilever bimorph, a certain method of fixed-frequency and adjustable-amplitude is confirmed to control the positioning device. The experimental results shows that the positioning device excited by fixed-frequency and adjustable-amplitude ramp voltage waveform worked with large travel range, heavy load ability, high positioning resolution and speed. With the advantages of high-precision positioning ability, simple structure and only 1% costs of traditional impact drive mechanism, it is expected that the proposed positioning stage will be widely applied to the precision industry.