根据压电微位移精密驱动器的结构特点,将其分为直动型、位移放大型、位移累积型三大类。分析了基于杠杆原理和压曲原理的位移放大式驱动器;研究了蠕动式、惯性式、滚动式位移累积型驱动器,并给出了各类型新颖的代表机构。最后归纳了压电微位移精密驱动器结构设计的一般原则和设计经验。文中对压电精密微位移驱动器的设计工作具有借鉴和指导意义。
According to their structure characteristic, piezo-actuators have been classed with three categories: directly driving type, enlarged displacement type, and cumulative displacement type. Analyzed the displacement amplifier based on leverage and pressure-bend theory. Studied the inchworm style, inertial style and rolling style cumulative displacement actuator, respectively. Some representative mechanisms were particularized. Finally, general principles and experiences in the structure design progress of the piezo-actuators were given. This paper will be a reference and a guide for the precision piezo-actuator designer.