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Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) opt
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：2012.7.1
  • 页码：5946-5951
  • 相关项目：硅基聚合物单芯片多功能集成平面光波导器件的基础研究
作者： Xiaodong Li|Changming Chen|Kun Zhang|Jie Meng|Xinbin Wang|Tianfu Yang|Daming Zhang|Fei Wang|Zhiyuan Xie|
同期刊论文项目
硅基聚合物单芯片多功能集成平面光波导器件的基础研究
期刊论文 36 会议论文 15
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