中文摘要：

薄膜材料微加工是微纳技术、微机电系统、光电子领域的核心技术。文章提出了针对薄膜加工时缺乏有效的质量控制手段，应用激光诱导等离子体（LIBS）技术进行过程表征的方法。研究了脉冲激光微加工过程中等离子体量与激发条件的关系。得出了在低频（〈20Hz）和在确定能量水平条件下，等离子体量相对稳定，不依赖于脉冲次数。在单脉冲条件下，激发等离子体量随着能量的升高而增加。根据等离子体量和元素类别可实现对微加工过程去除量进行实时表征。

英文摘要：

Film micro-machining is a core in micro- and nano- technology, micro-electro-mechanical systems and photoelectron field. However, it is difficult to control the quality of machining in processing film. In the present paper the authors propose a method to solve this problem by using laser induced breakdown speetroscopy（LIBS）. The authors investigated the relation between excitation condition and the quantity of plasma in the process of micro-machining by pulse laser. At low frequency（〈20 Hz）, when the excitation energy was confirmed, the quantity of plasma was steady and independent of the number of pulses. When the authors used single pulse to excite the film, the quantity of plasma increased with the energy ascension. Based on the quantity of plasma and the species of elements, the authors realized the real-time control of micro-machining become true.