中文摘要：

在30 kW级直流电弧等离子喷射化学气相沉积装置下,采用Ar-H2-CH4混合气体,通过控制工艺参数,在多晶钼衬底上制备了微纳米复合多层金刚石自支撑膜。采用拉曼光谱对其进行成份分析、SEM观察膜体表面形貌,采用聚焦离子束（FIB）技术对其进行原位刻蚀,用高分辨电镜观察对其进行微观表征。结果显示,同普通微米膜相比,多层膜体是由微米晶金刚石层和纳米晶金刚石层组成,表面光滑,微米层与纳米层间具有相互嵌套式的界面,微/纳米复合多层金刚石自支撑膜中包含有纳米级金刚石晶粒、微米级金刚石晶粒和无定形碳。

英文摘要：

Micro/nano combined free-standing diamond films were deposited by 30kW DC arc plasma jet CVD method on polycrystalline molybdenum substrate with mixed fed gasses of argon, hydrogen and methane. SEM, XRD, Raman spectra, TEM, HREM were adopted to analyze the films element and microstructure. Specially, focus iron beam （FIB） was used to execute the specimen in the experiment. The results showed that the muhilayer diamond film with smooth surface consisted of micro-crystalline layers and nano-crystalline layers, comparing with the conventional microcrystalline diamond film. The boundary between micro-crystal layer and nano-crystal layer was nested by each other. The micro/nano combined structure diamond film embodied nano-sized diamond grain, micron-sized diamond grain and amorphous carbon.