中文摘要：

针对LLCC串并联谐振电路应用于高频正弦波输出场合，详细分析了LLCC串并联谐振电路的恒流恒压及滤波特性；深入探讨了移相全桥电路拓扑的开关频率与LLCC的串并联谐振频率一致情况下的LLCC滤波特性，得到输出正弦波的THD与LLCC的参数、负载以及占空比等因素的数学关系；详细分析讨论了LLCC的参数对软开关以及滤波特性的影响，讨论了变压器寄生参数对LLCC电路的影响。给出以THD为指标的高频正弦波输出的LLCC谐振电路参数的设计步骤，最后设计实现了10kW，40kHz正弦波输出的真空溅射电源并进行了实验研究和验证，为高频正弦波输出逆变器的设计提供有效的理论指导。

英文摘要：

Aiming at the application of LLCC series-parallel resonant circuit in high-frequency sine wave output, the constant-current constant-voItage and filter characteristics of LLCC series-parallel resonant circuit were analyzed in detail. The LLCC filter characteristics of the switching frequency of the phase- shifted full-bridge topology coinciding with the LLCC＇s series-parallel resonant frequency were discussed. The mathematical relationship between THD and LLCC parameters, load and duty cycle were obtained. The effect of LLCC parameters on soft switching and filter characteristics was discussed in detail, and the influence of parasitic parameters of transformer on LLCC circuit was discussed. The design steps of the parameters of the LLCC resonant circuit were given with THD as the index of high frequency sine wave output. The analysis was verified by the 10 kW, 40 kHz sine-wave output power supply for vacuum sput- tering designed according to the design guidelines, which provides effective guidance for the design of high frequency sine wave output inverter.