中文摘要：

“粘连”失效常见于电容式静电驱动MEMS器件，通过建立“粘连”失效模型分析得出静电引力驱动机制导致的介质充电是其失效的根本原因。为消除介质充电问题，提出了一种新型的基于静电斥力的驱动机制：通过向固定极板施加电压，利用驱动结构周围形成的不均匀电场在可动极板垂直方向上产生合力，使可动极板向上弯曲运动。结合静电斥力典型驱动结构，通过COMSOL Multiphysics仿真分析结构尺寸、驱动电压与极板最大形变量的关系。仿真结果表明：在静电斥力结构中，驱动电压与可动极板长度呈线性关系，但与垂直间距呈非线性关系，会出现突降。此外，在结构尺寸固定的情况下，驱动电压与极板最大形变量几乎呈线性关系，这与静电引力驱动中无法通过改变驱动电压线性控制形变量不同。

英文摘要：

Stiction is a major failure mode in many electrostatically driven capacitive MEMS devices.A failure model is built;analysis concludes that the stiction failure due to dielectric charging is mainly caused by the driving mechanism of electrostatic attraction.To eliminate the dielectric charging problem,a novel driving mechanism based on electrostatic repulsion is proposed.When a bias voltage is applied to the fixed electrodes,a non-uniform electric field around micro actuator is formed and a net force is produced in the vertical di-rection of the movable electrode,which makes the movable electrode bend upward.The relationship between the structure dimension, applied voltage and maximum displacement is studied with COMSOL Multiphysics simulation considering the typical structure of electro-static repulsion.The simulation results show that in the electrostatic repulsion structure,the applied voltage has a linear relationship with the length of the movable electrode plate,but has a nonlinear relationship with the gap between fixed and movable electrodes.In addi-tion,the applied voltage has a linear relationship with the maximum displacement of movable electrode under fixed structure dimension condition,which is different from the situation in electrostatic attractive structure where the displacement could not be linearly controlled thought changing the applied voltage.