中文摘要：

单层自组装膜是指溶液中的有机功能分子通过分子间及其与基体材料之间反应形成的稳定、有序的界面分子组装体系，其最大特点是有机功能分子与固体基质表面之间化学结合，稳定性高。综述了二氧化硅表面单层自组装膜的研究现状，总结了二氧化硅表面单层自组装膜的修饰及在微观上的加工技术，并对各种技术的原理和应用状况加以描述，最后展望了二氧化硅表面单层自组装膜的发展前景。

英文摘要：

Self-assembled monolayer （SAM） is defined as a two-dimensional film, one molecule thick, covalently assembled at an interface. The major advantage of SAMs is their stability originated from covalently assembling between organic functional molecule and solid substrate. The research situation of SAMs on silicon dioxide surface is summarized; the modification and micro-engineering techniques of SAMs on silicon dioxide surface are outlined; and the principles and applications of these techniques are described. Finally, the future challenges in this field are posed.