中文摘要：

用电子束蒸发的方法在Ti盘上沉积氧化钛薄膜。分别用场发射扫描电镜,X射线光电子谱和X射线衍射分析所制备薄膜的表面形貌、化学成分和晶体结构,所制备的氧化钛薄膜的晶体结构依赖于制备过程中的沉积参数,薄膜的成分主要为金红石结构,是包含TiO2,Ti2O3和TiO三种结构的多晶体,随着沉积过程中氧气流量的增加,所制备的薄膜中高价钛离子（如Ti4＋）的含量不断增大,同时低价钛离子（如Ti2＋）的含量不断减小。随着氧气流量的增加和后续热处理温度的升高,薄膜的结晶度不断增大,并呈现出单一金红石（101）相位的趋势。

英文摘要：

The titanium oxides films were deposited by electron beam evaporation on high purity titanium substrate to improve the bio-compatibility of the endovascular stent.The microstructures and stoichiometries of the films were characterized with field emission scanning electron microscopy,X-ray diffraction and X-ray photoelectron spectroscopy.The impacts of the deposition conditions,such as the pressure,oxygen flow rate,substrate temperature and annealing temperature,were studied.The fairly compact polycrystalline films displayed the anatase phase,consisting of a mixture of TiO_2,Ti_2O_3,and TiO.The results show that the oxygen flow rate strongly affects the oxidation state of titanium.To be specific,as the oxygen flow rate increases,the density of higher valent Ti ion （Ti4＋） increases,whereas the density of lower valent Ti ion （Ti2＋） decreases.Moreover,the increases of oxygen flow rate and annealing temperature lead to an improvement of its crystallization and a gradual transition to the single anatase phase with the orientation in TiO_2（101）.