中文摘要：

以Mg0.4Zn0.6O为靶材,采用射频磁控溅射方法在石英玻璃衬底上沉积MgxZn1–xO薄膜。利用能量色散X射线谱分析了不同衬底温度下制备的薄膜中Mg含量;用X射线衍射和吸收光谱研究了物相结构及其光学性质。结果表明：不同衬底温度下制备的MgxZn1–xO薄膜均为六方纤锌矿结构,且具有良好的c轴取向。衬底温度为200℃时,制备的薄膜样品的（002）方向衍射峰强度最大,表明此温度下薄膜的结晶程度最高。衬底温度为300℃时,制备的薄膜样品中Mg的含量最高为0.438 mol,其室温下吸收光谱的吸收边位于281 nm。

英文摘要：

MgxZn1–xO thin films were deposited on quartz glass substrate by radio-frequency magnetron sputtering using Mg0.4Zn0.6O as the target.The Mg contents in the thin films prepared at different substrate temperatures were analyzed by energy dispersive X-ray spectroscopy.The phase structures and optical properties of the thin films were investigated via X-ray diffraction and absorption spectra.The results show that the structure of the MgxZn1–xO films prepared at different substrate temperatures is hexagonal ZnO wurtzite with good c-axis orientation.And the（002） diffraction peak of the film with（002） orientation prepared at 200 ℃ is the strongest,which indicates that the film has good crystallinity at this temperature.The film prepared at substrate temperature of 300 ℃ has the highest Mg content of 0.438 mol,and its absorption edge at room temperature locates at 281 nm.