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Depth Control Method of AFM-based Nanomachining with Diamond Tip in Deflection Mode
  • 期刊名称：Applied Mechanics and Materials
  • 时间：0
  • 页码：578-582
  • 语言：中文
  • 相关项目：基于AFM金刚石微探针的纳米加工机理研究
作者： Z. J. Hu|Y. D. Yan|S. Dong|T. Sun|Z. Z. Zhao|
同期刊论文项目
基于AFM金刚石微探针的纳米加工机理研究
期刊论文 23 会议论文 5 专利 2
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