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Fabrication of microstructures on the surface of a micro/hollow target ball by AFM
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：035002-035002
  • 语言：英文
  • 相关项目：基于AFM金刚石微探针的纳米加工机理研究
作者： Dong, S.|Sun, T.|Zhao, X. S.|Hu, Z. J.|Yan, Y. D.|
同期刊论文项目
基于AFM金刚石微探针的纳米加工机理研究
期刊论文 23 会议论文 5 专利 2
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