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MD Analysis on Tip Geometry Effects in AFM-based Lithography Process
  • ISSN号：1013-9826
  • 期刊名称：Key Engineering Materials
  • 时间：0
  • 页码：228-233
  • 语言：英文
  • 相关项目：基于AFM金刚石微探针的纳米加工机理研究
作者： Y. C. Liang|Y. D. Yan|T. sun|S. Dong|
同期刊论文项目
基于AFM金刚石微探针的纳米加工机理研究
期刊论文 23 会议论文 5 专利 2
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