中文摘要：

为了探索在纳米尺度加工微纳米结构，MEMS／NEMS器件的新的加工方法，采用基于AFM改造的微加工系统，研究了探针机械刻划机理，分析了工作台的定位精度，AFM的工作模式，探针形状等因素的影响．以复杂字体“哈工大”为例说明了微纳米结构轮廓坐标的获得，并加工了实例．同时还给出了齿轮形状，各种复杂二维结构的加工实例．结果表明采用AFM探针机械刻划技术可以应用在微纳米尺度结构的加工领域．

英文摘要：

To study novel methods for fabricating micro/nano and MEMS/NENS structure on the nanometer scale, based on AFM reconstructed system, mechanical scratching mechanism with an AFM tip, effects of positioning accuracy, AFM modes and tip geometry are investigated. Complex Chinese Character ＂哈工大＂ are fabricated and treated as an example to explain how to obtain coordinates of the structure. Simultaneously, a gear shape and two-dimensional structures are machined. Results show that AFM-based mechanical scratching technique can be applied in the fields of fabrication of micro/nano structures.