针对非制冷980nm半导体激光器组件的封装结构,对采用倒装贴片封装的激光器模块内部芯片外延层、热沉和焊料层进行了优化设计,运用有限元法(FEM)对微型双列直插(mini—DIL)非制冷980nm半导体激光器在连续波(CW)驱动条件下的热场分布进行了模拟计算。对比了倒装贴片和正装贴片的激光器热特性,并对实际封装的激光器光电性能进行了测试。倒装贴片型非制冷980nm半导体激光器的输出光谱在0~70℃时中心波长漂移仅为0.2nm,半峰全宽(FWHM)小于1.6nm,边模抑制比(SMSR)保持在45dB以上,最大出纤功率达200mw。研究结果表明.倒装贴片的非制冷980nm半导体激光器在热稳定性和光电性能方面都有较大提高,能够满足高性能小型化掺铒光纤放大器对非制冷980nm半导体激光器的性能要求。
According to the packaging structure of uncooled 980 nm semiconductor laser module, the chip epitaxial layer, heat sink and solder layer in the epitaxy (epi)-down bonded lasers module were designed, and the heat distribution of mini-dual in line (DIL) uncooled 980 nm semiconductor laser under the continuous-wave (CW) drive conditions was simulated using the finite element method (FEM). The thermal properties of epi-down and epi-up bonded lasers were compared, and the photoelectric properties of actual laser module were tested. Epi-down bonded uncooled 980 nm semiconductor laser can work steadily over a wide temperature range of 0--70 ℃ , with a small wavelength shift of 0.2 nm, full-width at half-maximum (FWHM) less than 1.6 nm, side-mode suppression ratio (SMSR) of more than 45 dB, and a high optical power of 200 mW. The results show that the optical and thermal characteristics of epi-down bonded uncooled 980 nm semiconductor laser have been greatly improved, and it can meet the need of high-performance miniature erbium-doped fiber amplifier.