介绍了一种新型压电驱动器含金属芯压电陶瓷纤维(MPF),推导了MPF的驱动电压与位移关系,运用ABAQUS软件对MPF进行了有限元仿真,并将MPF在不同驱动电压下的位移进行了理论值和仿真值的对比,验证了所推导公式中响应位移和驱动电压关系的正确性。通过实验测试了MPF的迟滞特性,并设计了迟滞逆模型开环控制、迟滞逆模型结合比例、积分和微分(PID)的两种控制方法对MPF进行了迟滞补偿控制。实验表明,复合控制的效果较好,MPF迟滞得到了很好补偿,使输入和输出呈线性,实现了高于10nm的高精度定位。复合控制的实验结果也进一步验证了MPF位移公式的正确性。
A new type of piezoelectric metal core piezoelectric fiber(MPF) actuator is introduced. The relation- ship between voltage and displacement is deducted and finite element simulation is used to ana!ysis MPF. Compara- tive study gives the difference of the displacement between the theory results and the simulation results under differ- ent driving voltage, and verifies the relationship between driving voltage and displacement in the formula. The MPF hysteresis is also test, and two methods are designed to compensate hysteresis control: the inverse hysteresis model of open loop control and the combination of PID. Test shows that the composite control is better with good compen- sation of the MPF hysteresis, and linear input and output. High-precision positioning is realized by higher than the 10 nm. The experimental results of composite control further verify the correctness of the MPF displacement formu- la.