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中文摘要：
基于双E型膜片结构的六维力传感器用于常规环境下的机器人操作已有成熟应用,探讨将该结构应用于微纳环境下的机器人操作的可能性。首先介绍了该弹性体结构的测力原理,并用有限元分析软件对弹性体的静态和动态特性进行了仿真。结果表明此种结构的六维力传感器可在微纳环境下测力,并具有各向灵敏度高、线形好、维间耦合小等优点。
英文摘要：
The elastic body structure of Six-axis force sensor based on the double layer E-type membrane was used in the normal situation maturely. The possibility of the same elastic body structure used in the micro-operation is discussed. The working principle of the sensor structure is introduced firstly, and the static and dynamic characteristic of the elastic body is obtained by finite element analysis. The results dem- onstrate that six-axis force sensor with this kind of structure can be used in micro-operation and the sensor has high sensitivities in each axis and high linearity. The static couple is negligible.
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