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Preparation of AlN films by pulsed laser deposition using sintered aluminum nitride and elemental al
  • 期刊名称：J. Vac. Sci. Technol. A
  • 时间：0
  • 作者或编辑：3448
  • 第一作者所属机构：复旦大学
  • 页码：2001,19 (1). 299-305
  • 语言：英文
  • 相关项目：微波放电和激光烧蚀混合等离子体的特性和应用
作者： 吴嘉达||孙剑|应质峰等|
同期刊论文项目
微波放电和激光烧蚀混合等离子体的特性和应用
期刊论文 19 获奖 1
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