位置：成果数据库 > 期刊 > 期刊详情页
Electron cyclotron resonance plasma assisted pulsed laser deposition of carbon nitride thin films
  • 期刊名称：Proc. SPIE
  • 时间：0
  • 作者或编辑：3448
  • 第一作者所属机构：复旦大学
  • 页码：2002, 4426, 237–240
  • 语言：英文
  • 相关项目：微波放电和激光烧蚀混合等离子体的特性和应用
作者： 施维|吴嘉达|凌浩等|
同期刊论文项目
微波放电和激光烧蚀混合等离子体的特性和应用
期刊论文 19 获奖 1
同项目期刊论文
激光诱导等离子体中铜原子和铜离子的时空行为
Raman spectra of nanocrystalline carbon nitride synthesized on cobalt-covered substrate by nitrogen-
激光诱导等离子体在真空和低压非活性气氛中的演变
Gallium nitride films synthesized by reactive pulsed laser deposition from a GaAs target
Composition and Structure of BCN Films Prepared by Ion Beam-Assisted Pulsed Laser Deposition
Low-temperature synthesis of nitride films by ECR plasma aided reactive pulsed laser deposition
Formation of CNx thin films by reactive pulsed laser deposition assisted by electron cyclotron reson
Preparation of AlN films by pulsed laser deposition using sintered aluminum nitride and elemental al
Photoluminescence and its time evolution of AlN thin films
ECR等离子体辅助反应脉冲激光沉积氮化碳薄膜
Preparation of thin films of carbon-based compounds