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ECR等离子体辅助反应脉冲激光沉积氮化碳薄膜
  • 期刊名称：功能材料
  • 时间：0
  • 作者或编辑：3448
  • 第一作者所属机构：复旦大学
  • 页码：2001, 32 (增刊)1418-1420
  • 语言：中文
  • 相关项目：微波放电和激光烧蚀混合等离子体的特性和应用
作者： 施维、凌浩、孙剑|
同期刊论文项目
微波放电和激光烧蚀混合等离子体的特性和应用
期刊论文 19 获奖 1
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