中文摘要：

设计超声引线键合机换能器驱动信号采集系统,获得超声粗铝丝楔键合过程中换能器系统的驱动电流、电压信号,计算换能器系统的输入功率和输出阻抗信号。进行了1000次不同超声功率条件下的键合试验,获得换能器系统驱动信号和键合强度值。根据试验结果的统计规律,研究换能器系统的输入功率和输出阻抗的时域特征规律,平均值和与键合强度的关系,以及不同阶段的平均值与键合强度的关系。研究结果表明,换能器系统平均输入功率与键合强度间的关系明显,呈开口向下的抛物线形式;键合过程的P1和P2阶段是影响键合强度的主要阶段,具有同样重要的作用,P3阶段虽然不影响键合强度,但其平均功率在一定程度上反映了键合是否成功;换能器系统的输出阻抗与键合强度间的关系不明显,不适合于表达键合强度。

英文摘要：

A transducer driver signal acquisition system is developed. The voltage and current signal of the transducer are acquired during the ultrasonic heavy aluminum wedge bonding. The input power and output impedance signal are calculated. Under different conditions, 1 000 times bonding tests are carried through, and driver signals are recorded. According to the test results, the time-domain characters of the input power and output signals are proposed, the relationship between bonding strength and the aver- age value of input power or output impedance are obtained. The results show that the bonding strength and input power of transducer system has an obvious relationship like a parabola with downward open side. Phase P1 and P2 are the main phases effecting the bonding strength, and have the same important functions. Although phase P3 has no effect on the bonding strength, its average power indicated the bonding strength in a certain extent. But the relationship between output impedance and bonding strength is not clear, and not fit to indicate bonding strength.