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Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology
  • ISSN号：1750-0443
  • 期刊名称：Micro & Nano Letters
  • 时间：2011.11.11
  • 页码：900-903
  • 相关项目：活化与细密的微电铸层界面结合理论与控制方法
作者： Du, Liqun|Liu, Yaping|Li, Chengbin|
同期刊论文项目
活化与细密的微电铸层界面结合理论与控制方法
期刊论文 16 会议论文 5 专利 3
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