中文摘要：

为了在节点化设计方法中对静电驱动的蝴蝶结状双端固支梁进行分析，采用伽辽金残余法建立了静电驱动梯形梁单元的节点化模型，在HSpice中构建了相应的等效电路模型．与有限元仿真结果及文献中给出的实验结果进行了比较，结果表明模型具有较高的精度，可在相关设计中作为参考．

英文摘要：

In order to perform mixed-domain simulation of electrically actuated bow-tie shaped fixed-fixed beams, the governing equations treatment for trapeziform beam elements under electrostatic load was carried out based on a Galerkin residual method. The nodal model for the trapeziform beam and corresponding equivalent circuit is developed by HSpice. It proves accurate in comparison with FEA results and experiment results given by the Reference.