磁驱动微执行器是一种重要的微执行器。与静电驱动相比,磁驱动具有一些无可替代的优点。静磁驱动是磁驱动方式中重要的一种,具有广阔的应用前景。综述了国内外静磁微执行器模型的最新进展,分析了各类模型的优缺点,特别强调了在微观领域,不能通过简单的电-磁类比得到相应的磁微执行器的各类模型。讨论了磁微执行器的各种典型的pull-in模型。这些模型对磁微执行器的设计、分析与优化具有重要的参考和实用价值。
Magneto-microactuator is one of the most important microactuators. Magneto-microactuators have many advantages than electrostatic microactuators. Magnetostatic microactuator is one type of magneto-microactuators and is widely used. So magnetostatic actuators are currently drawing much attention. But the magneto-microactuators models cannot be derived just through simple similar models to the electrostatic microactuators. Many kinds of lumped-parameter models and distributed-parameter models were introduced. The pull-in principle and developments of all kinds of classical magneto-microactuators are also introduced. It can be a very useful reference to the designer of magneto-microactuators.