中文摘要：

采用磁过滤直流阴极真空弧源沉积技术在Ti6Al4V合金表面制备类金刚石多层膜,采用原子力显微镜和纳米压痕仪观测其表面形貌及硬度;采用微磨粒磨损试验机及三电极电化学测试系统考察类金刚石多层膜在模拟体液环境中的摩擦学和耐蚀性能,并与Ti6Al4V合金进行对比。结果表明：类金刚石多层膜由致密分布的纳米颗粒组成,表面粗糙度为4.86nm,硬度和弹性模量分别为54.82和342.27GPa;在模拟体液中类金刚石膜显著提高了Ti6Al4V合金的抗磨能力和减摩性能,其磨损率仅为Ti6Al4V合金磨损率的11.7%～22.6%。随着载荷增加,Ti6Al4V合金和类金刚石膜的腐蚀电位降低,腐蚀电流增加;类金刚石多层膜可有效提高Ti6Al4V合金的耐蚀能力。

英文摘要：

Diamond-like multilayer films were deposited on Ti6Al4V alloy substrate by filtered cathodic vacuum arc （FCVA） technique. The morphology of the films was observed with an atomic force microscope and the hardness was determined with a nano-indenter. Tribological properties and corrosion resistance of the diamond-like multilayer film in simulated body fluid were investigated using a micro-abrasion tribometer and an electrochemical testing system with three electrodes. Results show that the multilayer films consist of compact nanoparticles,and the surface roughness is about 4.86 nm; the hardness and elastic modulus of multilayer films are approximately 54.82 GPa and 342.27 GPa,respectively. In simulated body fluid,the diamond-like multilayer film remarkably improves the anti-wear ability and friction-reduction performances of the Ti6Al4V alloy substrate,and the wear rate of the multilayer film is only 11.7%-22.6% of Ti6Al4V alloy＇s. With an increase of load,the corrosion potential of the film decreases and the corrosion current density increases; the deposited diamond-like multilayer films can effectively improve the corrosion resistance of Ti6Al4V alloy.