中文摘要：

采用磁过滤直流阴极真空弧源沉积技术在Ti6Al4V表面制备C／C多层DLC膜，利用纳米压痕划痕仪测试薄膜的纳米硬度和膜-基结合强度，采用微磨粒磨损试验机对C／C多层DLC膜在模拟体液环境中的磨损性能进行评价，并与Ti6Al4V的耐磨性能进行对比．结果表明：C／C多层DLC膜硬度达54．82GPa，弹性模量和划痕临界载荷分别为342．27GPa和0．52N；在模拟体液环境中DLC膜的耐磨性能显著优于Ti6Al4V合金，DLC膜的磨损机制主要包括二体磨损及混合磨损；随着料浆浓度的增加，DLC膜的磨损机制从二体磨损向混合磨损过渡．

英文摘要：

Diamond-like carbon muhilayer films were prepared on Ti6Al4V substrate by filtered cathodic vacuum arc （FCVA） technique. Hardness of muhilayer film and strength between the coating and substrate were determined with a nano-indenter and scratch tester respectively. Tribological properties were investigated in simulated body fluid using micro-abrasion tribometer. Results showed that hardness and elastic modulus of muhilayer films were approximately 54.82 and 342.27 GPa respectively, and the critical scratch load was about 0.52 N. Compared with Ti6Al4V alloy, C/C muhilayer films exhibited excellent wear resistance, the wear mechanism of DLC film includes two-body abrasion and mixed abrasion. With increasing slurry concentration, the wear mechanism of DLC film turned to mixed abrasion from two-body abrasion.