中文摘要：

宏多孔硅基于MEMS技术,通过清洗、氧化、光刻和湿法刻蚀等工艺流程制备,其大比表面积的多孔三维结构可作为很好的骨架结构。以宏多孔硅为基底,在其表面以及通道内沉积集流层,制备的宏孔导电网络可作为微型储能器件电极的衬底。实验改进了传统浸泡的沉积方法,使其优化为液流沉积,显著改善了集流层沉积不均匀现象。改善后的宏孔导电网络集流层均匀性良好,在作为储能器件的衬底时,可以更好地沉积活性物质,增强其黏附性、扩大储能器件的容量,并在后续储能器件的循环测试中起到大幅度提高稳定性的作用。

英文摘要：

The macro porous silicon based on the MEMS technology was prepared through cleaning,oxidation,photolithography and wet etching processes,and its three-dimensional structure with a large specific surface area can serve as a good frame structure.Deposited the collecting layer on the surface and in the channel of the frame structure with the macro porous silicon as the substrate,the macro-porous electrically conductive network（MECN）was formed to be used as the electrode substrate in the micro energy storage device.The drop flowing deposition method instead of the traditional steep deposition method was developed,and the deposition uneven phenomenon of the collecting layer was greatly improved.The collecting layer of the optimized MECN is of good uniformity.With the macro-porous electrically conductive network as the substrate of the energy storage device,the active material can be deposited on it with high quality.The conductive network can enhance the adhesion of the active material,expand the capacity of the energy storage device,and greatly improve the stability of the energy storage device in the following loop test.