中文摘要：

利用波长为172nm的真空紫外光刻蚀技术（Vacuum ultraviolet lithography,VUV）对聚甲基丙烯酸甲酯（PMMA）薄膜的表面进行了图案化微加工,并采用扫描电镜和原子力显微镜对微图案化的PMMA膜的表面形貌进行了表征。此外,还通过跟踪测试真空紫外光照后PMMA膜表面随时间变化的水接触角研究了表面的亲疏水性。结果表明,利用该方法可以成功地在PMMA基材上一次性制备出保真度较好的亚微米级微流道,而且使微流道内表面具有稳定持久的亲水性。

英文摘要：

The sub-micron scale patterns is fabricated on polymethyl methacrylate（PMMA） surface by using vacuum ultraviolet lithography（VUV） at a wavelength of 172nm. The morphology of patterned PMMA surface is characterized by scanning electron microscopy（SEM） and atomic force microscopy（AFM）, respectively. Besides, the hydrophilicility of VUV-exposed PMMA surface is analyzed by static water contact angle. The results show that submieron channels with high-fidelity are successfully prepared via one step manufacture and hydrophilicity on VUV-exposed PMMA surface stably maintains for a long time.