中文摘要：

基于有限元压电材料中表面波传播的有限元分析原理,利用有限元分析软件COMSOL对基于ZnO单晶材料的声表面波器件进行多物理域耦合建模与仿真,提取出了符合声表面波振型的对称模态变形图和反对称模态变形图。通过谐振频率分析,计算出了ZnO单晶的相速度和机电耦合系数;通过频率响应分析,得出谐振器输入导纳、阻抗与频率之间的关系图;最后讨论了叉指换能器的结构对谐振频率、反谐振频率的影响,得出输入、输出叉指换能器（IDT）的叉指电极对数越大,插入损耗值越大,信号衰减越小。

英文摘要：

Based on the finite element analysis of surface wave propagation characteristics in a piezoelectric mate rial, the multi-physics field coupling analysis software of COMSOL was used to simulate the single crystal ZnO- based surface acoustic wave resonators. Symmetric mode and antisymmetric mode of the ZnO surface acoustic wave were established. The phase velocity and eleetromechanical coupling coefficient of the ZnO single crystal were calcu- lated by the analysis of the resonance frequency. By analyzing the frequency response, the relationship of the resona torts input admittance, impedance and frequency was obtained. Finally, the effect of IDT structure on the resonant frequency,anti-resonant frequency were discussed. The more the IDT＇s input and output interdigital electrode pair is, the larger the insertion loss and signal attenuation.