中文摘要：

根据RCWT（严格耦合波理论）和等效介质理论,提出了在可见光波段的基于半导体材料氮化铟的亚波长光栅导模共振滤波器的结构设计和仿真方法,并探讨了滤波器反射谱对光栅参数的敏感性.在维持滤波器高峰值反射率、低旁带和窄线宽不变的条件下,利用其对光栅周期的敏感性,结合仿真提出了利用微机电系统梳齿驱动器改变光栅周期（ΔT 为0-99.7nm）从而线性地控制共振波长输出（调谐范围为23nm）,实现了半高全宽小于1.15nm 的可调谐反射型导模共振滤波器.

英文摘要：

In the light of the rigorous coupled wave theory and the equivalent medium theory,we propose a design and simula-tion method for an InN-based sub-wavelength grating guided-mode resonance filter structure in the visible spectral region and investigate the sensitivity of the filter reflection spectrum to thegrating parameters.When the filter high-peak reflectivity,low sideband and narrow linewidth remain unchanged,we change the grating period (ΔT = 0~99.7 nm)by a Micro-Electro-Me-chanical-System (MEMS)comb actuator using its sensibility to the grating period in connection with the simulation,thus line-arly controlling the resonant wavelength output in a tunable range of 23 nm and realizing aperiod-tunable reflective guided-mode resonance filter with the Full Width at Half Maximum(FWHM)smaller than 1.1 5 nm.