依据交叉型微流道的结构设计要求,分析了金刚石磨粒排布方式对交叉微流道形成规律的影响。仿真了固定磨粒研磨加工轨迹的均匀性,计算了不同磨粒排布方式下加工轨迹线形成的微流道分形维数,得到了被加工工件表面的宏观和微观开孔率。综合对比了不同磨粒排布方式对轨迹均匀性、分形维数和开孔率的影响,获得了最佳的金刚石磨粒螺旋排布方式。
Effects of diamond abrasive arraying forms on the interdigitated micro-channel were studied according to the design of micro-channel structure.Uniformity of lapping trajectory for fixed lapping was simulated,and fractal dimension of micro-channel was calculated with different abrasive arraying forms,both of macro and micro opening rate of bipolar plate surface were studied.Optimal spiral arraying form of diamond abrasive was obtained by comparing uniformity of lapping trajectory,fractal dimension and opening rate.