中文摘要：

用直流磁控溅射技术在304不锈钢基体上制备导电非晶碳膜，重点研究了基体偏压对非晶碳膜微结构、导电性和耐蚀性的影响。结果表明：与纯不锈钢双极板相比，经非晶碳膜表面改性的不锈钢表面的导电性和耐蚀性均大幅度提高。当基体偏压为-200V时在质子交换膜燃料电池组装典型压力（1．5MPa）下非晶碳膜的SP2含量最高，使改性不锈钢双极板具有最低的接触电阻（16．65Ωm·cm2）；在模拟质子交换膜燃料电池工作环境的腐蚀溶液中镀膜后不锈钢板的腐蚀电位显著提高，腐蚀电流明显下降。尤其在偏压-200V下薄膜具有最佳的致密性，腐蚀电位为0．25V腐蚀电流密度为1．22×10-8／cm3，耐蚀性能最佳。

英文摘要：

The conductive amorphous carbon films were deposited on the 304SS by conventional di- rect current magnetron sputtering. The effect of substrate bias on the microstructure and property of amorphous carbon films were mainly investigated. The results show that the electrical conductivity and corrosion resistance are improved significantly for the carbon films coated stainless steel in comparison to the untreated ones. Specifically, when the substrate bias was -200 V the contact resistance was about 16.65Ωm·cm2, which may be ascribed to the highest fraction of sp2 bonds under the normal compacting force of the fuel cells at 1.5 MPa. The corrosion potential of the carbon films coated stainless steel signifi- cantly increased in the simulated PEM fuel cells environment, while the corrosion current density obvious- ly decreased, especially when the bias was-200 V the carbon film performs the best corrosion resis- tance, which may be attributed to its best compactness, for this case the corrosion current density is 1.22×10-8 Ncm2 and the corrosion potential is 0.25 V.