中文摘要：

为实现MEMS微结构周期运动过程中各个时刻的旋转角度及其动态特性参数的高分辨力测量，针对频闪成像技术获得的微结构运动图像序列，提出了一种基于相位相关技术与Radon变换技术相结合的旋转角度测量方法。该方法通过Radon变换将图像的空间坐标转换为极坐标的参数空间，使得空间坐标的旋转投影为参数坐标的平移运动，然后通过相位相关技术的亚像素运动估计算法，得到物体旋转角度的高分辨力测量结果。实验结果显示，用该方法测量旋转角度分辨力优于0．01°，表明该方法可以有效地减少由旋转产生的形变对测量结果的影响，提高测量结果的稳定性并减少测量误差。

英文摘要：

To realize the high resolution measurement of rotation motion to get the characteristic and dynamic parameters of MEMS resonators in every moment, this paper presents a method to measure the rotation angle based on the combination of Radon transform and phase correlation for the motion image sequences of microstructures collected by a stroboscopic imaging technology. By the Radon transform,the motion in Descartes coordinates is transferred to parameters of polar coordinates, so that the rotation motion is projected to displacements of parameters. Then, the displacements are measured by a phase correlation method to realize a subpixel motion measurement. Experimental results show that the resolution power of rotation angle is superior to 0.01°. MEMS motion process is analyzed by the method, and the offered solutions indicate that the influence of the distortion caused by rotation is deceased, while the repetition of measurement is increased.