MEMS Test System Based on Virtual Instrument Technology
ISSN号:1006-4982
期刊名称:天津大学学报(英文版)
时间:0
页码:88-92
语言:中文
分类:TH-39[机械工程] TH87[机械工程—仪器科学与技术;机械工程—精密仪器及机械]
作者机构:[1]State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
相关基金:Supported by National Natural Science Foundation of China (No. 50505031 ) , Tianjin Municipal Science and Technology Commission (No.043185911) and Program for New Century Excellent Talents in University.