中文摘要：

实现了MEMS谐振器周期运动过程中各个时刻的运动特性及其动态特性参数的纳米精度测量,可为MEMS器件的设计提供重要参考。提出了一种基于块匹配方法的灰度补偿亚像素运动估计测量方法。该方法在块匹配技术的基础上,通过双线性插值技术获得亚像素精度的运动位移,同时引入对比度和亮度参数对因图像灰度变化而引起的误差进行补偿,通过最小二乘法获得物体运动位移的纳米级分辨力测量结果。实验结果表明,该方法测量分辨力优于0.01 pixel,对MEMS器件运动位移的测量重复性为5.5 nm。该方法可以有效地减少图像灰度变化对测量结果的影响,提高测量结果的稳定性并减少测量误差。

英文摘要：

In order to provide a reference for Micro-electro-mechanical System(MEMS),a measuring method insensitive to frame-to-frame intensity variations was designed based on block matching and the subpixel motion was measured through bilinear interpolation technology.The contrast and brightness parameters were introduced into the method to decrease the errors caused by the changes of image gray scale.With the least square method,a nanoscale measuring accuracy was obtained.The experimental results show that the meas...