中文摘要：

以SnCl2·2H2O及无水乙醇为原料，利用溶胶-凝胶法在快速热退火下制备了SnO2纳米薄膜，研究了快速热退火（RTA）对SnO2薄膜性质的影响，采用X射线衍射谱（XRD）、扫描电子显微镜（SEM），研究了薄膜的晶粒尺寸、微结构、表面形貌与快速热退火条件的关联，用傅里叶变换红外光谱（FT-IR）和光致发光研究了薄膜的光学性质．结果表明，快速热退火（RTA）温度对薄膜的光学性质、晶粒尺寸和薄膜的结构形态均有较大的影响。

英文摘要：

By using SnCl2 2H2O as main materials and ethanol as solvent, nano-SnO2 thin films were prepared by sol-gel technique with rapid thermal annealing （RTA）. The effect of rapid thermal annealing（RTA） on property of nano-SnO2thin film was explored. The size of grains, the microstructure, the morphology and the optical properties of nano-SnO2 thin films were characterized by XRD, SEM, PL and FT-IR. The results indicate that the optical property and the grain-size, the microstructure, and the morphology of the samples change evidently with different temperature of RTA.