中文摘要：

可调光衰减器（VOA）是波分复用（WDM）系统中最重要的器件之一,它的主要功能是控制和衰减光信号。设计并制备了基于石英衬底的4通道马赫增德尔（Mach-Zehnder）干涉型热光可调光衰减器阵列。首先介绍了热光可调光衰减器的结构和原理,模拟了在有外加偏压时的热场分布,然后介绍了器件的设计及制备工艺过程,并对所制备的器件进行测试。实验结果表明,制备器件的插入损耗小于1.1 dB,动态衰减范围为0~30 dB。在衰减量为30 dB时,外加偏压为12.5 V,功耗仅有120 mW。最后分析了测试结果,并提出了改善器件性能的方法。

英文摘要：

Variable optical attenuator （VOA） is one of the most important devices of the wavelength division multiplexing （WDM） systems. Its main function is control and attenuate the optical signal. A 4-channel Mach-Zehnder interferometer （MZI） thermo-optic VOA array with low power-consumption based on the quartz substrate was designed and fabricated. Firstly, the structure and theory of the thermo-optic VOA were introduced and the steady heat distribution with voltage applied on the device was simulated. Then the design and fabrication process were introduced, and the performance of the fabricated device were measured. The experimental results show that the static transmission loss is less than 1. 1 dB, the dynamic attenuation range is 0- 30 dB, the voltage applied is 12.5 V and the maximum power-consumption of the VOA is only 120 mW with the attenuation of 30 dB. Finally, the experimental results were analyzed, and the methods of improving the performance of the fabricated device were proposed.