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中文摘要：
主要讨论了面阵电控液晶微透镜在设计、制作和测试等方面的若干关键性问题，主要包括：（一）进行了液晶结构电极间的电场分布仿真；（二）通过标准微电子工艺制作了原理性器件；（三）采用高斯激光束照射液晶结构，在改变驱动电压的情形下获得了所需要的电控光学干涉性能。所制作的阵列液晶微透镜具有制作工艺简单、器件紧凑、灵巧、功耗低、操作方便、易于匹配耦合与集成等特点。分析了将所发展的液晶微透镜技术用于改善和增强红外焦平面探测结构的光电性能等方面的问题。
英文摘要：
Some key issues in the design, fabrication and measurement of liquid crystal （ LC ） micolens array controlled electrically were discussed, which were： （ 1 ） The simulation of electric field distribution between electrodes of the lens is carried out, （2） the principle devices are fabricated through standard microelectronics technology, （3）optical interference performance is obtained by illumining the LC structure with Gaussian laser beam under the condition of changing the driving voltage of LC device. The LC microlens array acquired has some special features, such as simple fabrication technology, smart structure, low energy consumption, being easy to operate,being convenient to couple or integrate LC device with opto-electronic detectors, etc. We also analyze the possibility of improving and enhancing the opto-electronic performance of IR focal plane structure by utilizing the LC device.
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