中文摘要：

利用飞秒激光直写微纳加工平台, 对6H-SiC材料进行了突破衍射极限的微纳结构加工研究. 使用中心波长和脉宽分别为800 nm和130 fs的钛蓝宝石激光器和荧光倒置显微镜搭建了飞秒激光直写微纳加工平台, 研究了在不同的实验条件下对6H-SiC的光学加工情况, 采用扫描电子显微镜对加工结构进行表征. 通过分析不同的激光功率和不同的曝光时间等实验条件下加工的分辨率, 发现分辨率随着激光功率的减小而提高, 随扫描速度的增大而提高, 且能突破光学衍射极限. 最终获得125 nm的加工线宽, 并加工了加工线宽240 nm, 周期1.0 μm的线阵列. 研究结果为微机电系统（MEMS）的微器件设计开创了新的思路, 对发展MEMS器件具有重要意义.

英文摘要：

Sub-diffraction-limit fabrication of 6H-SiC is investigated with femtosecond laser direct-write setup. Micro/nano-fabrication on 6H-SiC is studied with a home-made micro/nano-fabrication platform, which is integrated with a fluorescence microscope and a Ti：sapphire laser with a central wavelength of 800 nm and pulse duration of 130 fs. Micro/nano-structures are characterized with scanning electron microscope. It is found that the spatial resolution is improved with the decrease of laser power and the increase of scanning velocity. The smallest resolution achieved is 125 nm and line array with a line width of 240 nm and a period of 1 μm is fabricated. This work paves the new way for integrated micro electro-mechanical systems devices.