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Two-photon polymerization fabrication and Raman spectroscopy research of SU-8 photoresist using the femtosecond laser
  • ISSN号:1673-1905
  • 期刊名称:《光电子快报:英文版》
  • 时间:0
  • 分类:TN305.7[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]
  • 作者机构:[1]New Energy Department, Tianjin Sino-German University of Applied Sciences, Tianjin 300350, China, [2]Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics, Nankai University, Tianjin 300457, China
  • 相关基金:supported by the National Basic Research Program of China(No.2010CB934101);the National Natural Science Foundation of China(No.11404173)
中文摘要:

在这个工作,处理设备的二光子的聚合(2PP ) 用直接写的 femtosecond 激光,和 femtosecond 激光被造在 SU-8 上被执行光致抗蚀剂。由于 femtosecond 激光引起的光致抗蚀剂的 2PP 效果,有尺寸的聚合的线不到焦点的点尺寸被获得。在 2PP 前后基于 SU-8 聚合物的拉曼光谱学描述,我们研究 femtosecond 激光的动态过程导致的 2PP。在拉曼系列,一些散布与大紧张变化达到顶点,例如 1 108 厘米 -1 和 1 183 厘米 -1, 显示 C-O-C 的不对称的拉长颤动在 SU-8 结合聚合物被增加。由比较,我们能发现 2PP 仅仅影响开始者的轻吸收,但是不影响单体聚合。理解光致抗蚀剂和 femtosecond 激光的相互作用是有用的,并且在控制 SU-8 聚合物的聚合度并且改进 2PP.1 的处理决定的份量上起一个重要作用

英文摘要:

In this work, a two-photon polymerization(2PP) processing device was built using the femtosecond laser, and femtosecond laser direct writing was performed on SU-8 photoresist. Due to the 2PP effect of the photoresist caused by the femtosecond laser, the polymeric line with size less than the focal spot size is obtained. Based on the Raman spectroscopy characterization of SU-8 polymer before and after 2PP, we research the dynamic process of femtosecond laser induced 2PP. In Raman spectra, some scattering peaks with large intensity variation, such as 1 108 cm~(-1) and 1 183 cm~(-1), indicate that the asymmetric stretching vibration of C-O-C bond in SU-8 polymer is increased. By comparison, we can find that 2PP only affects the light absorption of initiator, but does not affect the monomer polymerization. It is helpful to understand the interaction of photoresist and femtosecond laser, and plays an important role in quantitatively controlling the polymerization degree of SU-8 polymer and improving the processing resolution of 2PP.

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期刊信息
  • 《光电子快报:英文版》
  • 主管单位:
  • 主办单位:天津理工大学
  • 主编:巴恩旭
  • 地址:天津市西青区宾水西道391号
  • 邮编:300384
  • 邮箱:Oelett@yahoo.com.cn
  • 电话:022-23679707 23657134
  • 国际标准刊号:ISSN:1673-1905
  • 国内统一刊号:ISSN:12-1370/TN
  • 邮发代号:6-198
  • 获奖情况:
  • 中国期刊方阵“双效”期刊
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  • 被引量:147