中文摘要：

介绍了一种简单而有效的对片上螺旋电感建立集总等效电路模型的方法，并提出了用电容和电感补偿等效代替的思想，实现了9个参数的宽频带电路。通过仿真ADS中空气桥横跨式结构和电介质隔离地下通道式结构，该等效模型在26-40GHz带宽内获得了S参数、有效电感值和Q值比较好的拟合效果，为片上螺旋电感的提参建模提供了快速、可行的方案。

英文摘要：

A simple and effective method for establishing lumping equivalent circuit model of on-chip spiral inductors is introduced in the paper. Then an idea of equivalent substitution for compensation with capacitances and inductors is pro- posed and a wide-band circuit with nine parameters is realized. By simulating the structure of air bridge across type and die- lectric isolation underpass type in ADS respectively, the equivalent model has good fitting effect on S-parameters, effective inductor values and Q-factors from 26 GHz to 40 GHz. Therefore, it can provide fast and feasible scheme for parametric mod- eling of on-chip spiral inductors.