中文摘要：

使用Abaqus有限元软件通过加载荷与加载位移两种方法对含硅类金刚石膜进行了压痕测试模拟,得到了不同硅含量类金刚石膜的硬度曲线。结果表明：两种方法的模拟结果较吻合,其中加载位移的方法较稳定,速度较快,含硅类金刚石膜的硬度随着硅含量的增加而减小;模拟结果得到了相关试验的验证。

英文摘要：

The simulation for indentation testing of Si-containing diamond-like carbon（Si-DLC） film was carried out by infinite element simulation software Abaqus using loading and displacement methods,and the hardness of the diamond-like carbon film with different silicon contents was obtained.The results show that the two methods fit fairly well,the displacement method was fairly stable and its speed also was fairly quick,and the hardness of Si-DLC film decreased with the increase of the silicon content.The finite element simulation was in agreement with correlative experiments.