中文摘要：

根据MEMS工艺设计的特点提出了反馈式专家系统运作方式,并据此给出了MEMS版图自动生成与工艺匹配系统的体系结构.同虚拟MEMS加工工艺相比,该系统可实现工艺流水的逆向推理流程,由此,进一步给出了系统逆向推理所需的专家规则描述方式和推理机实现方法,并实现了一个原型系统,该系统可实现由两种标准MEMS工艺制作器件的版图自动生成与工艺匹配工作,初步验证了系统的可行性.

英文摘要：

The paper refines the expert experience of MEMS process, and contributes to the automatic design in MEMS process. First, the paper analyses every process, then brings forward the concept of expert system （ES） based on feedback, and constructs the architecture of the system of MEMS layout autogeneration and process matching. Compared to the virtual process, the system implements the reverse reason, so the paper dissertates the rules and implementation of reasoning about reverse reason. At last, the paper implements a prototype system, which can design the process and layout from MEMS components made by two standard MEMS processes, and validates the feasibility of the system.