中文摘要：

以一个电容式微加速度计为设计实例来介绍了基于IP库MEMS设计的流程,其中主要包括四个部分：原理分析,结构设计,工艺流程和版图设计,封装及电路测试。首先根据需求设计出加速度计的基本结构;然后对该结构进行工艺流程和版图的设计;并利用虚拟工艺来进行仿真和可加工性验证;得到的三维结构通过接口导出到FEM中进行数值分析;接着将数值分析的结果进行基于FEM的运动学建模;求解得到的运动规律,以宏模型的形式存入IP库中;与此同时,利用虚拟运行进行可视化行为级的仿真。

英文摘要：

Based on silicon/glass anodic bonding technology and inductively coupled plasma （ICP） high aspect ratio etching, this paper first presented a IP based MEMS design tools, then proposed a new kind of the capacitive accelerometer, which combined two methods of changing parallel capacitance effectively, fol lowing the key technical steps, mechanical design, structural optimistic, Virtual Fabrication Process, Virtual Operation, and finally the design pattern and process, fabrication and test. The result shows that the accelerometer can reach high linearity.