Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr0.52Ti0.48)O3 Microstructures
- ISSN号:1005-0302
- 期刊名称:《材料科学技术学报:英文版》
- 时间:0
- 分类:TB383[一般工业技术—材料科学与工程] TM282[电气工程—电工理论与新技术;一般工业技术—材料科学与工程]
- 作者机构:[1]Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, and Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan 411105, China, [2]Department of Engineering Mechanics, University of Nebraska, Lincoln, 68588-0526, USA, [3]Department of Mechanical Engineering, University of Washington, Seattle, Washington, 98195-2600, USA
- 相关基金:Acknowledgements We acknowledged partial support from National Nat- ural Science Foundation of China (Grant Nos. 10772155, 10732100 and 10902095), the Provincial Natural Science Foundation of Hunan Province, China (Grant Nos. 07331008 and 09337004), and the Scientific Research ~hlnd of Hunan Provincial Education Department (Grant No. 08C864). The Asylum Research MFP-3D Atomic Force Microscope was acquired through an ARO DURIP grant (W911NF-08-01-0262). Li also acknowledged support from US National Science Foundation (DMR 0706100 and OS).
关键词:
高分辨透射电子显微镜, 压电陶瓷, 图案化, 微结构, 应力, O3, 胶基, 胶凝, Soft lithography, Piezoresponse force microscopy, Pb(Zr0.52Ti0.48)O3
中文摘要:
Corresponding author. Tel.: +86 731 58293835; E-mail address: shxie@xtu.edu.cn (S.H. Xie);
Corresponding author. jjli@u.washington.edu (J.Y. Li).