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纳米薄膜力学性能的尺寸相关性及其残余应力分析
  • ISSN号：1812-1918
  • 期刊名称：《纳米科技》
  • 时间：0
  • 分类：O484[理学—固体物理;理学—物理] O369[理学—流体力学;理学—力学]
  • 作者机构：[1]中山大学工学院,广东广州510275, [2]广东省建筑科学研究院,广东广州510500, [3]中山大学物理科学与工程技术学院,广东广州510275
  • 相关基金：国家自然科学基金（10572155,10732100）,教育部博士点专项基金（20060558070）
作者： 佘慧[1,2], 王彪[3]
关键词： 纳米薄膜, 残余应力, 表面应力, 力学性能尺寸相关性, nano-film, residual stresses, surface stress, size-dependent elastic properties
中文摘要：

系统地分析了纳米薄膜残余应力产生的物理机制，重点讨论了表面应力对纳米薄膜的影响，解释了纳米薄膜特殊的力学性能尺寸相关性，并通过考虑表面应力的有限元模型给出了纳米薄膜单轴拉伸的数值模拟结果。

英文摘要：

The mechanisms of residual stresses in nano-film were analyzed. The effects of surface stress on nano-film are explored to explain the unique size-dependent elastic properties of nano-film. The uniaxial tension test of nano-film is analyzed by finite element model with considering surface stress.

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期刊信息
  • 《纳米科技》
  • 主管单位:陕西省科学技术协会
  • 主办单位:西安纳米科技学会 陕西省电子学会纳米科技学会 西安纳米学会 陕西省电子学会纳米技术专业委员会
  • 主编：徐友龙
  • 地址：西安市科技路37号海星城市广场B座24层
  • 邮编：710075
  • 邮箱：namikeji2013@163.com
  • 电话：029-88153782
  • 国际标准刊号：ISSN：1812-1918
  • 国内统一刊号：ISSN：
  • 邮发代号:
  • 获奖情况:
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  • 被引量:857