加速度计的零偏、刻度因子、安装误差都会影响加速度计的精度。以微机械系统(MEMS)加速度计为实验对象,采用卡尔曼(Kalman)滤波对实验数据进行滤波,结合六位置法得到MEMS加速度计的零偏、刻度因子、安装误差与MEMS加速度计测量值的关系,最终获得基于Kalman滤波和六位置法的MEMS加速度计标定补偿数学模型。通过实验测试表明,补偿后MEMS加速度计的输出值更接近标准值,且加速度计解算俯仰角(-90°~+90°)的绝对误差由补偿前的1°经补偿后减小为0.34°。验证了该标定补偿算法的可行性,对提高MEMS加速度计测量精度有较好的理论和工程应用价值。
The bias,scale factor,installation error of accelerometer will affect its accuracy.Taking MEMS accelerometer as the experimental object,using the Kalman filtering to filter the experimental data,and combining with the six-position method,the relationship between the MEMS accelerometer bias,scale factor,installation error and the MEMS accelerometer measured data has been obtained.Finally,the calibration and compensation model of MEMS accelerometer based on Kalman filtering and the six-position method has been established in this work.The experimental tests show that the output values of the MEMS accelerometer after compensating is closer to the standard ones,and the absolute error of the calculated pitch range of-90°~+90°is reduced from 1°before compensating to 0.34°after compensating.The feasibility of the calibration compensation algorithm is verified,it has good theoretical and engineering application value in improving the MEMS accelerometer measurement precision.