中文摘要：

紫外LED光刻光源具有价格低廉、体积小、能耗低、寿命长、环保等诸多优点，因而近年来受到国内外学者的广泛关注。本文简要分析光刻光源系统的结构，归纳紫外LED光刻光源的特点，详细阐述现阶段国内外对紫外LED光刻光源系统的最新研究进展及成果，通过对系统输出光特性的综合分析与讨论全面综述了紫外LED光刻光源系统的光学设计方法，为紫外LED应用于高端微加工设备的进一步研究提供有益参考。

英文摘要：

With the advantages of low cost, small volume, low energy consumption, long service life and environment friendly , application of UV-LED lithography light source has attract widespread concern for scholars home and abroad in recent years. The structure of lithography light source system is analyzed briefly and the characteristics of UV-LED lithography light source is concluded. The new progress in both home and abroad for UV-LED lithography source is discussed in detail. By comprehensive analysis of ultraviolet light output and discussion, the optical system design method of UV-LED lithography source is presented, which, provide a beneficial reference for. applications of UV-LED in high-end micro process.